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Aluminum Nitride AlN
Material Properties
Formula AlN
Molar Mass 40.99
Density 3.26 g/cm³
Melting Point 2500 °C
Sputtering / Vacuum Data
Sputter Mode RF, Reactive
Maximum Power Density 20 W/in²
Temperature / Vapor Pressure  
Crucible Liner Graphite, PBN,W, Mo
Z-Ratio  
Notes:
decomposes in vacuum before melting